ELECTRICA

Hybrid Micro-Ring Resonator Hydrogen Sensor Based on Intensity Detection

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Department of Electrical and Electronic Engineering, University of Bristol School of Engineering, Bristol, UK

ELECTRICA 2018; 18: 167-171
DOI: 10.26650/electrica.2018.56722
Read: 964 Downloads: 632 Published: 03 August 2018

In this paper, a photonic integrated device fabricated on a silicon-on-insulator(SOI) platform is studied numerically to investigate its hydrogen sensingpotential based on intensity variations. A single-slot hybrid structureconsisting of a coaxial micro-ring resonator (MRR) and a palladium (Pd) disk isutilized for this purpose. The results of the numerical study reveal a hydrogensensing ability of 2.83×10-4/(v/v-% hydrogen) and limit of detection (LOD) of9.93×10-3 which is more than 10 times of that of the hydrogen sensors based onthe traditional resonance shift. The proposed hydrogen sensing techniquepresents a compatible SOI-based technology and also provides a reliabledetection of the slightest changes from the zero concentration in an analyticalprocedure.

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