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In this study mode matching technique is used to obtain scattering parameter representations of waveguides loaded inhomogeneously with lossless dielectrics in the cross-sectional direction. The accuracy of our numerical solutions are assessed by comparing our results both with measured data and also, whenever available, with the results reported in the literature. Numerical results are presented to display the dependence of the scattering parameters on the electrical properties and geometrical dimensions of such structures.