Frequency Response Analysis of Mems Comb-Drive Resonator Integrated with a Polymer Thin Film Layer
(ELECTRICA 1; 1: -) DOI: 10.5152/electrica.2023.23124
(ELECTRICA 1; 1: -) DOI: 10.5152/electrica.2023.23124
(ELECTRICA 2024; 24: 210-217) DOI: 10.5152/electrica.2024.23124